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DC Sputtering Power Supplies HX 150 – HX 300

The very compact design of ½ 19” width and 5 HU is especially designed for production plants without cabinets. The HX has mounting flanges and can be integrated into or attached to the plasma chamber in any position. The display can be swivelled and separated from the power supply. An efficient water cooling ensures highest reliability even in non-air-conditioned rooms. In order to avoid condensation water an external magnetic valve can be connected via the integrated temperature control. The output power can be increased up to 240kW in parallel operation. The special electronic design allows master-slave-operation as well as parallel operation via Interface-Combiner or Profibus. The extreme fast Arc-Handling works completely automatic, so that no parameters have to be set.
  • Output power 15kW – 30kW
  • Parallel operation up to 240kW
  • Water cooling
  • Magnetic valve control
  • Cabinet ventilation with integrated particle interceptor
  • ½ 19”- case, 5 HU
  • Flange mounting
  • M8-female thread for crane eye
  • Replaceable, rotatable display
  • Automatic Arc-handling