Products & Accessories Power Supplies for Ion Sources

Datasheet for Ion Sources_062023 (365.5 KB)

For the operation of ion sources (Kaufmann and ECR), special power supplies are available. On request, the units can also be equipped with other output voltages or output power. All supplies have either an AS 4-interface, Profibus, EtherCat or RS232/484-interface.

          Highlights

            Wide range of uses in ion beam and plasma process technologies
Etching, sputtering and a lot more
Innovative applications, e.g., in micro-electronics, optics and sensors